PS-6/PS-6N 半導(dǎo)體特氣檢測探頭產(chǎn)品介紹
【中文版】
PS-6/PS-6N系列半導(dǎo)體特氣檢測探頭是專為集成電路、光伏和精密電子制造領(lǐng)域設(shè)計的高精度氣體監(jiān)測設(shè)備。該系列產(chǎn)品采用創(chuàng)新的傳感技術(shù)，可對半導(dǎo)體工藝環(huán)境中多種特殊氣體（如SiH4、PH3、AsH3等）進(jìn)行實時濃度監(jiān)測，助力企業(yè)實現(xiàn)安全生產(chǎn)與工藝質(zhì)量的雙重保障。
核心技術(shù)方面，PS-6/PS-6N搭載自主研發(fā)的多參數(shù)補償算法，通過溫度、濕度及壓力數(shù)據(jù)的動態(tài)校準(zhǔn)，顯著提升了檢測結(jié)果的準(zhǔn)確性。其模塊化結(jié)構(gòu)設(shè)計支持快速維護(hù)與部件更換，配合IP65防護(hù)等級的工業(yè)外殼，確保設(shè)備在復(fù)雜工況下的長期穩(wěn)定運行。探頭響應(yīng)時間小于3秒，檢測分辨率達(dá)到0.1ppm級別，可精準(zhǔn)捕捉微量化合物的濃度波動。
產(chǎn)品配備智能自檢系統(tǒng)，可實時監(jiān)測傳感器狀態(tài)并提示維護(hù)周期，有效延長核心元件的使用壽命。標(biāo)準(zhǔn)化的模擬/數(shù)字信號輸出接口支持與主流DCS、PLC系統(tǒng)無縫對接，多種安裝方式適配不同規(guī)格的氣體管路布局。特別開發(fā)的抗交叉干擾算法，有效避免混合氣體環(huán)境下的誤報風(fēng)險。
PS-6N型號在基礎(chǔ)版PS-6的功能上進(jìn)行了升級優(yōu)化，增強了對超低濃度氣體的檢測靈敏度，同時將工作溫度范圍擴展至-20℃~60℃，滿足更嚴(yán)苛的工業(yè)場景需求。全系列產(chǎn)品采用耐腐蝕材質(zhì)打造，適用于刻蝕、沉積、離子注入等關(guān)鍵制程環(huán)節(jié)的在線監(jiān)測。
【English Version】
The PS-6/PS-6N Semiconductor Specialty Gas Detection Probe is a high-precision monitoring solution specifically engineered for IC manufacturing, photovoltaic production, and advanced electronics fabrication. This series employs innovative sensing technology to perform real-time concentration monitoring of various process gases (including SiH4, PH3, AsH3, etc.) in semiconductor manufacturing environments, supporting both operational safety and process optimization.
Featuring proprietary multi-parameter compensation algorithms, the PS-6/PS-6N dynamically calibrates detection data based on temperature, humidity, and pressure variations, achieving remarkable measurement accuracy. Its modular architecture enables swift maintenance and component replacement, while the IP65-rated industrial housing guarantees reliable performance in challenging operating conditions. With a response time under 3 seconds and 0.1ppm-level resolution, the probe excels at detecting subtle concentration fluctuations of trace compounds.
The integrated self-diagnostic system continuously monitors sensor health and provides maintenance alerts, effectively extending core component lifespan. Standardized analog/digital output interfaces ensure seamless integration with mainstream DCS and PLC systems, complemented by multiple installation options for diverse gas pipeline configurations. The specially developed anti-cross-interference algorithm significantly reduces false alarms in complex gas mixtures.
The PS-6N variant enhances the base PS-6 model with improved sensitivity for ultra-low concentration detection and an extended operating temperature range (-20℃ to 60℃), catering to more demanding industrial applications. Constructed with corrosion-resistant materials, the entire series proves ideal for in-line monitoring during critical processes such as etching, deposition, and ion implantation.
Both models deliver continuous 24/7 monitoring capability through low-power consumption design, with optional remote data transmission modules enabling centralized gas management across multiple production lines. Customizable alarm thresholds and multi-level warning outputs provide flexible safety parameter configuration for different process requirements.
